MEMS, Microengineering and Aerospace Systems

Microelectronics processing technology spawned a new area of science and engineering exemplified by the acronyms MEMS (microelectromechanical systems) and NEMS (nanoelectromechanical systems). Microengineering is a multidisciplinary investigation of the physics and science of the submillimeter scale world and the application of this understanding to develop mass-producible microdevices and systems. Aerospace systems will benefit from microengineering technology due to reduced size, mass and power requirements for many standard functions. Microengineering can also enable precise control of surfaces and fluid dynamics. This paper provides an overview of microengineering relevant to aerospace systems. Special focus is given to fabrication and development of micropropulsion systems.